The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Jul. 09, 2003
Takeshi Ootsuka, Funabachi, JP;
Takeshi Ootsuka, Funabachi, JP;
Abstract
An electrode-built-in susceptor is formed by a susceptor base body which is made of an aluminium-nitride-group-sintered-member on one of which surface a plate sample is mounted, an inner electrode which is built in the susceptor member, a power supplying terminal which is disposed in the susceptor base body so as to be attached to the inner electrode, and an insulating layer which is formed mainly by one of a boron nitride, a lithium oxide, an aluminium oxide, or a magnesium oxide is formed between the inner electrode and the mounting surface. By doing this, it is possible to provide an electrode-built-in susceptor which has a superior durability under a high temperature oxidizing atmosphere condition without a concern in that a thermal efficiency decreases and a plate sample is contaminated.