The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Oct. 28, 2004
Yuan Lo, Longtan Township, Taoyuan County, TW;
Kye-chyn Ho, Longtan Township, Taoyuan County, TW;
Lung-yung Lin, Hsinchu, TW;
Deng-horng Tsai, Dayuan Township, Taoyuan County, TW;
Schiu Sche, Hsinchu, TW;
Yuan Lo, Longtan Township, Taoyuan County, TW;
Kye-Chyn Ho, Longtan Township, Taoyuan County, TW;
Lung-Yung Lin, Hsinchu, TW;
Deng-Horng Tsai, Dayuan Township, Taoyuan County, TW;
Schiu Sche, Hsinchu, TW;
Chung Shan Institute of Science and Technology, Taoyuan County, TW;
Neostones Micro Fabrication Corporation, Hsinchu, TW;
Abstract
A micro accelerometer including a plurality of proof masses is provided to detect the acceleration of the first axis, the second axis and the third axis. The disclosed micro accelerometer has the advantages of close loop control, mechanical decoupling, and not relying on high aspect ratio manufacturing technology.