Humidity sensor and method of using the humidity sensor

Abstract

A humidity-sensitive porous layer () of a humidity-sensitive element section () of a humidity sensor () is formed of a crystalline phase oxide grains such as AlO—SnO—TiOand of a glass phase such as silicate glass covering the crystalline phase. The glass phase contains an alkali metal oxide and/or alkaline earth metal oxide such as LiO. The humidity sensitive porous layer () assumes a skeletal structure that is formed of crystalline phase oxide grains covered or coated with the glass phase. A heater () of the humidity sensor is controlled to heat the humidity-sensitive element section () at a temperature ranging from 500° C. to 800° C. so as to clean off the humidity-sensitive element section while an internal combustion engine is running and exhausting fouling substances. Measurement of Humidity in an exhaust gas exhausted from an exhaust gas purifying apparatus of an internal combustion engine is carried out by using the humidity sensor (), so long as the exhaust gas temperature does not exceed 100° C. regardless of whether or not the engine is running.