The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Nov. 10, 2004
Applicant:
Peter Van Der Meulen, Newburyport, MA (US);
Inventor:
Peter van der Meulen, Newburyport, MA (US);
Assignee:
Blueshift Technologies, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and systems are provided for handling an item in a vacuum-based handling system for semiconductor manufacturing. The methods include providing a heater or dryer for the load lock of the handling system that dries a semiconductor wafer during the pumping down of the load lock.