The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2007
Filed:
Jun. 24, 2005
Applicants:
Hiroshi Yuasa, Kyoto, JP;
Tetsuo Satake, Hyogo, JP;
Masazumi Matsuura, Tokyo, JP;
Kinya Goto, Tokyo, JP;
Inventors:
Hiroshi Yuasa, Kyoto, JP;
Tetsuo Satake, Hyogo, JP;
Masazumi Matsuura, Tokyo, JP;
Kinya Goto, Tokyo, JP;
Assignees:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/47 (2006.01); H01L 23/48 (2006.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
Abstract
A hole is formed in an insulating film containing silicon and carbon. The insulating film has a density or a carbon concentration varying gradually in the direction of the thickness thereof.