The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2007
Filed:
Aug. 18, 2003
Hitoshi Yamada, Kawasaki, JP;
Akira Tokai, Kawasaki, JP;
Manabu Ishimoto, Kawasaki, JP;
Akira Nakazawa, Kawasaki, JP;
Kenji Awamoto, Kawasaki, JP;
Tsutae Shinoda, Kawasaki, JP;
Hitoshi Yamada, Kawasaki, JP;
Akira Tokai, Kawasaki, JP;
Manabu Ishimoto, Kawasaki, JP;
Akira Nakazawa, Kawasaki, JP;
Kenji Awamoto, Kawasaki, JP;
Tsutae Shinoda, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
According to the present invention, there is provided a method for forming a metal oxide film comprising, when a metal oxide film is formed by conducting a thermal treatment on a coating film containing an organic metal compound formed on an inner wall of a tube, performing an ultraviolet irradiation treatment or an ozone treatment on the coating film prior to or simultaneously with the thermal treatment.