The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2007
Filed:
Jul. 24, 2003
Marc Christophersen, Westerville, OH (US);
Jörg Bahr, Altenholz, DE;
Jürgen Carstensen, Kiel, DE;
Kay Steen, Bothell, WA (US);
Georgi Popkirov, Kiel, DE;
Helmut Föll, Mönkeberg, DE;
Marc Christophersen, Westerville, OH (US);
Jörg Bahr, Altenholz, DE;
Jürgen Carstensen, Kiel, DE;
Kay Steen, Bothell, WA (US);
Georgi Popkirov, Kiel, DE;
Helmut Föll, Mönkeberg, DE;
Kiel University, Kiel, DE;
Abstract
The device etches semiconductors with a large surface area in a trough-shaped receptacle containing a liquid electrolyte. A sample head is mounted inside the etching trough, and is provided with a device for holding at least one semiconductor wafer. The device is tilted to promote turbulent electrolyte flow in a space between a bottom surface of the semiconductor wafer and top surface of the trough-shaped receptacle.