The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2007
Filed:
Jul. 21, 2005
Applicant:
Arata Inoue, Chigasaki, JP;
Inventor:
Arata Inoue, Chigasaki, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G06F 9/45 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system for evaluating a design of a mask includes: an inspection data memory storing initial inspection data of an initial wafer fabricated by an initial mask; a design tool designing a modified mask based on the initial inspection data; a group of manufacturing tools forming an initial mask chip region with the initial mask and a modified mask chip region adjacent to the initial mask region with the modified mask; an inspection tool inspecting faults in the initial and modified mask chip regions; and an evaluation tool evaluating an improvement of the design of the modified mask.