The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2007
Filed:
Feb. 15, 2005
Hiroki Fujimoto, Kyoto, JP;
Noriyuki Kondo, Kyoto, JP;
Eiji Nishihara, Kyoto, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
A film thickness measurement apparatus has an image pickup part () for acquiring a plurality of single-band images corresponding to a plurality of wavelengths, and the image pickup part () acquires a plurality of reference single-band images representing a pattern on a reference substrate. A correction factor setting part () performs setting of a plurality of correction factors in accordance with distances from a specified pixel by using a plurality of reference single-band images. Subsequently, the image pickup part () acquires a plurality of measurement single-band images representing a pattern on an objective substrate and corrects a value of the specified pixel for each of a plurality of measurement single-band images by using the value of the specified pixel and values of pixels surrounding the specified pixel and the correction factors. A spectral reflectance calculation part () thereby calculates a reflectance at a measurement point on the objective substrate which corresponds to the specified pixel on the basis of the corrected value of the specified pixel with high accuracy.