The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 17, 2007

Filed:

Apr. 14, 2006
Applicants:

Masaru Adachi, Kitakyushu, JP;

Mitsunori Kawabe, Kitakyushu, JP;

Inventors:

Masaru Adachi, Kitakyushu, JP;

Mitsunori Kawabe, Kitakyushu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

In some preferred embodiments of the present invention, a method of performing calibration of an optical axis of a sensor installed on a hand of an arm of a robot by obtaining misalignment of the optical axis of the sensor relative to the hand or by obtaining misalignment of the hand relative to the arm is provided. A method of performing calibration by detecting a teaching tooldisposed at a semiconductor wafer placing position of a storage container or a carrying device by a sensorinstalled on a handof a robotto teach the position of the semiconductor wafer to the robotincludes a step of placing the teaching toolat specified position with the robot, a step of predicting the position of the teaching tooldetecting the teaching toolwith the sensor, and a step of obtaining a difference between the position of the teaching tooland the predicted value.


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