The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2007
Filed:
Dec. 13, 2003
Richard Dondero, Albuquerque, NM (US);
Doug Trotter, Albuquerque, NM (US);
Richard Dondero, Albuquerque, NM (US);
Doug Trotter, Albuquerque, NM (US);
NXP, B.V., Eindhoven, NL;
Abstract
A polysilicon silicide stringer fuse is constructed having a narrow width by using an overlay tolerance of the photo stepper tool instead of the minimum critical dimension tolerance of the stepper tool. In an example embodiment, a fuse () for integration within a semiconductor comprises depositing an insulating layer () adjacent to the semiconductor substrate (). A silicon layer () is formed with a first silicon material having a first resistance deposited adjacent the insulating layer (). The silicon layer has a first width. A metal silicide stringer (), having a second resistance different from the first resistance is deposited over a portion of the first silicon material () and having a second width that is less than the first width within at least a portion thereof. The metal silicide conducts current therethrough with approximately the second resistance and agglomerates in response to a programming current other than the conduct current therethrough with a same second resistance.