The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2007
Filed:
Jun. 25, 2001
Applicants:
Steven Verhaverbeke, San Francisco, CA (US);
J. Kelly Truman, Morgan Hill, CA (US);
Rick R. Endo, San Carlos, CA (US);
Alexander Ko, Sunnyvale, CA (US);
Inventors:
Steven Verhaverbeke, San Francisco, CA (US);
J. Kelly Truman, Morgan Hill, CA (US);
Rick R. Endo, San Carlos, CA (US);
Alexander Ko, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 3/12 (2006.01); B05D 1/34 (2006.01); B01F 5/04 (2006.01); B08B 3/00 (2006.01); B08B 3/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of and apparatus for mixing chemicals in a single wafer process. According to the present invention a chemical is fed into a valve system having a tube of a known volume. The chemical is fed into the valve system to fill the tube with a chemical to generate a measured amount of the chemical. The measured amount of chemical is then used in a single wafer process.