The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2007
Filed:
Sep. 20, 2001
Bulent M. Basol, Manhattan Beach, CA (US);
Cyprian Uzoh, Milpitas, CA (US);
Jeff A. Bogart, Los Gatos, CA (US);
Bulent M. Basol, Manhattan Beach, CA (US);
Cyprian Uzoh, Milpitas, CA (US);
Jeff A. Bogart, Los Gatos, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
The present invention includes a mask plate design that includes at least one or a plurality of channels portions on a surface of the mask plate, into which electrolyte solution will accumulate when the mask plate surface is disposed on a surface of wafer, and out of which the electrolyte solution will freely flow. There are also at least one or a plurality of polish portions on the mask plate surface that allow for polishing of the wafer when the mask plate surface is disposed on a surface of wafer.