The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2007
Filed:
Apr. 04, 2003
Applicants:
Ho-man Rodney Chiu, San Jose, CA (US);
Steven Verhaverbeke, San Francisco, CA (US);
John S. Lewis, Sunnyvale, CA (US);
Inventors:
Ho-man Rodney Chiu, San Jose, CA (US);
Steven Verhaverbeke, San Francisco, CA (US);
John S. Lewis, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 11/02 (2006.01); B23B 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus that includes a rotatable single wafer holding bracket with one or more wafer supports disposed on the single wafer holding bracket, wherein the one or more wafer supports position a center of a wafer to be off-center from an axis of rotation of the single wafer holding bracket.