The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 03, 2007

Filed:

Sep. 10, 2003
Applicants:

Yoshiaki Kojima, Saitama, JP;

Osamu Kasono, Saitama, JP;

Inventors:

Yoshiaki Kojima, Saitama, JP;

Osamu Kasono, Saitama, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G11B 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An optical disk(sample) is laid on a sample moving unitwithin a vacuum chamber. An electron beam radiating mechanismradiates an electron beam to the optical diskwhile moving the optical diskat a constant speed. Electron detecting meansdetects an electron from the optical disk. Thus, the track pitch is measured on the basis of a detected electron signal and a measured movement amount of the optical disk. Also, the electron beam radiating mechanismis provided with a fast deflectorfor averaging within a deflection area to measure the track pitch.


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