The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2007
Filed:
Apr. 29, 2005
Applicant:
Keiji Yamada, Kawasaki, JP;
Inventor:
Keiji Yamada, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
A controller controls a wafer carrier to move from a SMIF-POD to transfer and collect a wafer between a space of a transfer unit through a thermal chamber. The wafer carrier is returned into the SMIF-POD, when the wafer is exposed, to be kept waiting in the SMIF-POD until the wafer completes the exposure. The wafer can be shielded from direct airflow by a protection plate inside the transfer area.