The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2007
Filed:
Jun. 26, 2001
Ronaldus Joannes Cornelis Maria Kok, Eindhoven, NL;
Michael Adrianus Theodorus Hompus, Helmond, NL;
Marinus Franciscus Johannes Evers, Heeze, NL;
Anton Habraken, St. Oedenrode, NL;
Franciscus Cornelius Dings, Veldhoven, NL;
Ronaldus Joannes Cornelis Maria Kok, Eindhoven, NL;
Michael Adrianus Theodorus Hompus, Helmond, NL;
Marinus Franciscus Johannes Evers, Heeze, NL;
Anton Habraken, St. Oedenrode, NL;
Franciscus Cornelius Dings, Veldhoven, NL;
OTB Group B.V., Eindhoven, NL;
Abstract
Apparatus for performing at least one processing operation on a substrate, the apparatus being provided with at least one process chamber and a vacuum lock for the purposes of placing the substrate from the surroundings into a process chamber without the reduced pressure in the respective process chamber being lost, the vacuum lock comprising a vacuum chamber which is bounded by a number of walls and to which a vacuum pump is connected, while in one of the walls at least one supply opening is provided, and for the purpose of the or each process chamber in one of the walls a process chamber opening belonging to a respective process chamber is provided, the at least one supply opening being externally closable with an outer cover and being closable from the vacuum chamber with an inner cover. Further disclosed is an assembly of such an apparatus with a transport device for supplying substrates to a supply opening of the vacuum lock and removing same.