The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2007
Filed:
Nov. 12, 2004
Applicants:
Jens Kramer, Dresden, DE;
Thomas Gyulai, Ullersdorf, DE;
Arwed Reichel, Senftenberg, DE;
Inventors:
Assignee:
Advanced Micro Devices, Inc,, Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 49/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a system and a method according to the present invention, a seismic signal from a seismic sensor coupled to a drive assembly of a pad conditioning system is used to estimate the status of one or more consumables in a CMP system.