The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
May. 28, 2004
John J. Bockman, Santa Clara, CA (US);
Ludmila M. Golyanskaya, Saratoga, CA (US);
Kenneth J. Wayne, Saratoga, CA (US);
Miao Zhu, San Jose, CA (US);
John J. Bockman, Santa Clara, CA (US);
Ludmila M. Golyanskaya, Saratoga, CA (US);
Kenneth J. Wayne, Saratoga, CA (US);
Miao Zhu, San Jose, CA (US);
Agilent Technologies, Inc., Santa Clara, CA (US);
Abstract
An interferometer system includes a plane mirror interferometer, a turning mirror, a retardation plate assembly having a retardation plate that can be adjusted and then fixed, and a retroreflector. A light beam travels in a path comprising the plane mirror interferometer, the turning mirror, the retardation plate assembly, and the retroreflector. The retardation plate assembly may include a plurality of bearings, a ring riding on the bearings, the retardation plate mounted to the ring, and a plunger pushing the ring against the bearings. The retardation plate may be fixed by adhesive after determining an orientation that produces little polarization leakage in the system.