The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7195795 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 27, 2007

Filed:

Oct. 21, 2004
Applicants:

Yukichi Takamatsu, Kanagawa, JP;

Takeo Yoneyama, Kanagawa, JP;

Kazuaki Tonari, Kanagawa, JP;

Nobumasa Soejima, Kanagawa, JP;

Koji Kiriyama, Kanagawa, JP;

Takafumi Ishii, Kanagawa, JP;

Inventors:

Yukichi Takamatsu, Kanagawa, JP;

Takeo Yoneyama, Kanagawa, JP;

Kazuaki Tonari, Kanagawa, JP;

Nobumasa Soejima, Kanagawa, JP;

Koji Kiriyama, Kanagawa, JP;

Takafumi Ishii, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
Abstract

A material for forming an insulation film comprising an alkoxide compound of lithium and at least one kind of organic solvent selected from ether, ketone, ester, alcohol, and hydrocarbon. A material for forming an insulation film comprising a carboxylate of lithium, an organic solvent, and tetramethoxysilane or tetraethoxysilane. A film-forming method for forming an insulation film with the use of the material for forming an insulation film. An insulation film-forming over the various substrates by spin coating method, mist deposition method or CVD method with the use of these material becomes possible and enables to expect providing an insulation film of high quality and high purity containing lithium or lithium silicate.


Find Patent Forward Citations

Takamatsu, Yukichi. (2007). Material for forming insulation film and film-forming method with the use of the material (U.S. Patent No. 7195795). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7195795

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