The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2007

Filed:

Jul. 01, 2004
Applicants:

Atsushi Mikado, Toyama, JP;

Jun Tabota, Toyama-ken, JP;

Inventors:

Atsushi Mikado, Toyama, JP;

Jun Tabota, Toyama-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

A compact, highly sensitive acceleration sensor that is not affected by factors other than acceleration, such as a change in temperature, includes a bimorph acceleration-sensor element including first and second resonators and attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end or both longitudinal ends of the acceleration-sensor element is/are fixed such that the resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. The acceleration-sensor element is bendable about a central bending plane Nin response to the acceleration, the central bending plane Nbeing positioned at a central portion of the base plate with respect to the application direction of acceleration. Electrodes are disposed on main surfaces of the resonators, the main surfaces being substantially perpendicular to the application direction of acceleration. The height Hof the resonators in a direction that is substantially perpendicular to the application direction of acceleration is smaller than the height Hof the base plate in the direction that is substantially perpendicular to the application direction of acceleration.


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