The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
Mar. 19, 2004
Allen J. Bartlett, Mondon, MA (US);
Gary S. Ash, Dartmouth, MA (US);
Brian Thompson, Lakeville, MA (US);
Mark A. Stira, Wilmington, MA (US);
Allen J. Bartlett, Mondon, MA (US);
Gary S. Ash, Dartmouth, MA (US);
Brian Thompson, Lakeville, MA (US);
Mark A. Stira, Wilmington, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a relief valve port can connect the outer duct of the assembly to an exhaust stack.