The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2007
Filed:
Jan. 13, 2006
Applicants:
Kazuo Iizuka, Kanagawa, JP;
Junji Isohata, Tokyo, JP;
Nobuyoshi Tanaka, Tokyo, JP;
Inventors:
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/32 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A projection exposure mask including a first mask pattern for exposing a member to form a continuous pattern thereon, and a second mask pattern for exposing the member to form a discontinuous pattern thereon. One of the first and second mask patterns is a reflecting type mask pattern and the other mask pattern is a transmitting type mask pattern.