The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2007
Filed:
Jan. 24, 2005
Harumitsu Fujita, Hamamatsu, JP;
Harumitsu Fujita, Hamamatsu, JP;
Yamaha Corporation, , JP;
Abstract
A semiconductor substrate is partitioned along scribing lines so as to form a plurality of IC regions encompassed by seal rings, wherein a passivation opening is formed in the scribing line in which a monitoring element is formed within a monitoring element region, which is encompassed by secondary seal rings, which are constituted by metal layers, oxidation layers and via holes. The secondary seal rings are formed to encompass the periphery of the monitoring element, which can thus precisely monitor characteristics of integrated circuits because it is possible to prevent water and impurities from infiltrating into the monitoring element region which is thus stabilized in characteristics.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile