The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2007

Filed:

Jun. 26, 2002
Applicants:

Mira Ben-tzur, Sunnyvale, CA (US);

Krishnaswamy Ramkumar, San Jose, CA (US);

Seurabh Dutta Chowdhury, Belmont, CA (US);

Michal Efrati Fastow, Cupertino, CA (US);

Inventors:

Mira Ben-Tzur, Sunnyvale, CA (US);

Krishnaswamy Ramkumar, San Jose, CA (US);

Seurabh Dutta Chowdhury, Belmont, CA (US);

Michal Efrati Fastow, Cupertino, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract

In one embodiment, a passivation level includes a low-k dielectric. To prevent the low-k dielectric from absorbing moisture when exposed to air, exposed portions of the low-k dielectric are covered with spacers. As can be appreciated, this facilitates integration of low-k dielectrics in passivation levels. Low-k dielectrics in passivation levels help lower capacitance on metal lines, thereby reducing RC delay and increasing signal propagation speeds.


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