The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2007
Filed:
Nov. 15, 2004
Chia-nan Shen, Taipei County, TW;
Chia-Nan Shen, Taipei County, TW;
Chunghwa Picture Tubes, Ltd., Taipei, TW;
Abstract
A method of manufacturing a thin film transistor is described. A polysilicon island is formed over a substrate. A gate insulating layer is formed over the substrate to cover the polysilicin island. A gate is formed on the gate insulating layer above the polysilicon island. A passivation layer is formed over the substrate to cover the gate and the gate insulating layer. An ion implanting process is carried out to form a source/drain in the polysilicon island beside the gate, wherein a region between the source and the drain is a channel. After the first passivation layer is removed, a patterned dielectric layer is formed over the substrate, wherein the dielectric layer exposes a portion of the source/drain. A source/drain conductive layer is formed over the dielectric layer and is electrically connected to the source/drain.