The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 13, 2007

Filed:

Aug. 18, 2004
Applicants:

Reza Zoughi, Wildwood, MO (US);

Sergiy Kharkivskiy, Rolla, MO (US);

Mohammad Tayeb Ahmad Ghasr, Rolla, MO (US);

Inventors:

Reza Zoughi, Wildwood, MO (US);

Sergiy Kharkivskiy, Rolla, MO (US);

Mohammad Tayeb Ahmad Ghasr, Rolla, MO (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 27/32 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus for inspecting a sample for defects includes a signal generator for generating a signal and a device for splitting the signal into two separate signals which have substantially equal phase and magnitude. A sensor radiates the two signals on the sample and receives the two signals reflected from the sample. A device is provided for determining a difference between the two signals reflected from the sample without unwanted influence of variations of distance between the sensor and sample, and reflections from nearby sample edges and boundaries. A defect is determined to exist when a difference is found between the two reflected signals.


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