The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2007
Filed:
May. 27, 2005
Michael Kelly, Portola Valley, CA (US);
Zhengyu Wang, Stanford, CA (US);
Zhi-xun Shen, Stanford, CA (US);
Michael Kelly, Portola Valley, CA (US);
Zhengyu Wang, Stanford, CA (US);
Zhi-Xun Shen, Stanford, CA (US);
Stanford University, Stanford, CA (US);
Abstract
A microwave imaging microscope and associated probe, or a read head. The probe or the read head includes a sensor unit with three fixed electrodes, preferably a stimulating electrode surrounding a sensing electrode and isolated by a grounded electrode. Circuitry couples the stimulating electrode to the probe signal variably selected in the range of 100 MHz to 100 GHz and couples the sensing electrode to a signal processor detecting in-phase and out-of-phase components of the current or voltage across the sensing electrode and the grounded electrode. A mechanical positioner moves the probe vertically towards the sample and scans it across the sample. The probe may be formed by semiconductor processing methods on a silicon chip.