The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2007
Filed:
Sep. 12, 2003
Noriko Tomita, Miyagi, JP;
Takashi Ohsako, Miyagi, JP;
Noriko Tomita, Miyagi, JP;
Takashi Ohsako, Miyagi, JP;
Oki Electric Industry Co., Ltd., Tokyo, JP;
Abstract
A convenient method of depositing chemical protection material on the surface of a semiconductor substrate whereby deposition of contaminating substances after a clean surface has been obtained can be prevented and maintaining of this surface performed includes a process of depositing a high molecular straight-chain organic compoundonto a highly clean surfaceof a semiconductor substrateduring semiconductor washing or after semiconductor washing of the semiconductor substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile