The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2007
Filed:
Oct. 04, 2005
Hiromu Ishii, Kanagawa, JP;
Yasuyuki Tanabe, Kanagawa, JP;
Katsuyuki Machida, Kanagawa, JP;
Masami Urano, Kanagawa, JP;
Shouji Yagi, Kanagawa, JP;
Tomomi Sakata, Saitama, JP;
Hiromu Ishii, Kanagawa, JP;
Yasuyuki Tanabe, Kanagawa, JP;
Katsuyuki Machida, Kanagawa, JP;
Masami Urano, Kanagawa, JP;
Shouji Yagi, Kanagawa, JP;
Tomomi Sakata, Saitama, JP;
Nippon Telegraph and Telephone Corporation, Tokyo, JP;
Abstract
In a micromachine according to this invention, a polyimide film is formed on the surface of each electrode. The polyimide film is formed as follows. A substrate having each electrode and a counterelectrode are dipped in an electrodeposition polyimide solution, and a positive voltage is applied to the electrode. A material dissolved in the electrodeposition polyimide solution is deposited on a surface of the positive-voltage-applied electrode that is exposed in the solution, thus forming a polyimide film on the surface.