The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2007
Filed:
Mar. 05, 2004
Gregory Nordin, Huntsville, AL (US);
Jaime Cardenas Gonzalez, Charlotte, NC (US);
Michael A. George, Huntsville, AL (US);
Gregory Nordin, Huntsville, AL (US);
Jaime Cardenas Gonzalez, Charlotte, NC (US);
Michael A. George, Huntsville, AL (US);
University of Alabama in Huntsville, Huntsville, AL (US);
Abstract
A microcantilever sensing system includes a waveguide cantilever that permits an optical signal to propagate through an endface of the cantilever. The propagated signal is received by a receiver waveguide across a gap from the cantilever. The receiver waveguide provides the optical signal to a differential beamsplitter. The signal is differentially split according to the position of the optical signal incident upon the receiving waveguide. A method of determining a deflection waveguide microcantilever is also disclosed. An optical signal is transmitted from the endface of a waveguide microcantilever and received by the receiver waveguide. The optical signal is differentially split and then each split signal is compared to determine beam deflection. A method of fabricating a microcantilever sensor provides a differential beamsplitter in optical communication with a waveguide cantilever.