The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2007
Filed:
Apr. 22, 2002
Atsushi Machida, Suzaka, JP;
Suguru Warashina, Kawasaki, JP;
Hiroshi Ishikawa, Kawasaki, JP;
Tsutomu Miyashita, Kawasaki, JP;
Yoshio Satoh, Kawasaki, JP;
Atsushi Machida, Suzaka, JP;
Suguru Warashina, Kawasaki, JP;
Hiroshi Ishikawa, Kawasaki, JP;
Tsutomu Miyashita, Kawasaki, JP;
Yoshio Satoh, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Fujitsu Media Devices Limited, Suzaka, JP;
Abstract
An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.