The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Apr. 19, 2005
Kenya Sano, Kawasaki, JP;
Naoko Yanase, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Takaaki Yasumoto, Kawasaki, JP;
Ryoichi Ohara, Kawasaki, JP;
Takashi Kawakubo, Yokohama, JP;
Takako Motai, Yokohama, JP;
Kenya Sano, Kawasaki, JP;
Naoko Yanase, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Takaaki Yasumoto, Kawasaki, JP;
Ryoichi Ohara, Kawasaki, JP;
Takashi Kawakubo, Yokohama, JP;
Takako Motai, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A film bulk acoustic-wave resonator encompasses (a) a substrate having a cavity, (b) a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity, (c) a piezoelectric layer disposed on the bottom electrode, a planar shape of the piezoelectric layer is defined by a contour, which covers an entire surface of the bottom electrode in a plan view, (d) a top electrode on the piezoelectric layer, (e) an intermediate electrode located between the substrate and the piezoelectric layer, and at the contour of the piezoelectric layer, the intermediate electrode is connected to the bottom electrode in the inside of the contour, and (f) a bottom electrode wiring connected to the intermediate electrode extending from the contour to an outside of the contour in the plan view, wherein a longitudinal vibration mode along a thickness direction of the piezoelectric layer is utilized.