The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Aug. 19, 2004
Applicant:
Jung-nam Kim, Suwon-si, KR;
Inventor:
Jung-nam Kim, Suwon-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for calibrating a probe station includes a disk having a flat bottom surface, a plurality of thermosensors for measuring a temperature of a wafer chuck of the probe station, the plurality of thermosensors being disposed at predetermined positions on a top surface of the disk, and a level disposed at a predetermined position on the top surface of the disk.