The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Dec. 29, 2004
Applicants:
Yi-ming Chu, Kaohsiung, TW;
Wei-han Wang, Taipei, TW;
Chao-chi Wu, Kaohsiung, TW;
Inventors:
Assignee:
Industrial Technology Research Institute, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01); H02N 2/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Provided is a closed-loop feedback control positioning stage comprising at least one block formed therein, a plurality of hinge mechanisms for attaching the block in the stage, at least one actuator formed in the block, the actuator adapted to bend for moving the block in at least one direction, and a plurality of strain gauges each attached in a corresponding hinge mechanism for measuring its strain. The invention can repeatedly position the block at the moved location for carrying out a highly precise positioning of the stage.