The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 06, 2007

Filed:

Dec. 06, 2002
Applicants:

Christopher A. Bang, San Diego, CA (US);

Adam L. Cohen, Los Angeles, CA (US);

Michael S. Lockard, Lake Elizabeth, CA (US);

John D. Evans, Arlington, VA (US);

Inventors:

Christopher A. Bang, San Diego, CA (US);

Adam L. Cohen, Los Angeles, CA (US);

Michael S. Lockard, Lake Elizabeth, CA (US);

John D. Evans, Arlington, VA (US);

Assignee:

Microfabrica Inc., Van Nuys, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/10 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract

Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB™)


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