The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 06, 2007

Filed:

Apr. 21, 2006
Applicants:

Hideo Torii, Osaka, JP;

Eiji Fujii, Osaka, JP;

Atsushi Tomozawa, Osaka, JP;

Akiko Murata, Osaka, JP;

Ryoichi Takayama, Osaka, JP;

Taku Hirasawa, Kyoto, JP;

Inventors:

Hideo Torii, Osaka, JP;

Eiji Fujii, Osaka, JP;

Atsushi Tomozawa, Osaka, JP;

Akiko Murata, Osaka, JP;

Ryoichi Takayama, Osaka, JP;

Taku Hirasawa, Kyoto, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 9/04 (2006.01); H01L 41/047 (2006.01); H01L 41/083 (2006.01);
U.S. Cl.
CPC ...
Abstract

In a piezoelectric elementa first electrode layermade of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrateand a piezoelectric layermade of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layerso that the piezoelectric layeris preferentially oriented along the (001) plane.


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