The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Jan. 18, 2000
Kouji Yoshida, Tokyo, JP;
Kouji Yoshida, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A template creating unit () creates a waveform template formed of expectations of a signal waveform of the value of each parameter and a probability template formed of information on occurrence probability of each expectation of the parameters on the basis of the signal waveform measured. A matching judging unit () performs template matching of another signal waveform measured while using the expectation occurrence probability information included in the probability template as weight information for each parameter value. Further the template creating unit () creates a waveform template and a probability template considering the measured another signal waveform and prepares for the next pattern matching. Thus template matching is performed with improved matching accuracy for waveform of a signal varying with the value of a parameter.