The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Jul. 15, 2004
Tadayuki Kubo, Ibaragi, JP;
Tadayuki Kubo, Ibaragi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A positioning method that includes a step of moving a stage apparatus for supporting a workpiece or an object to be measured from an auxiliary mount to a positioning mount using a rolling guide extending from the positioning mount onto the auxiliary mount, a step of lifting the stage apparatus moved to the positioning mount using a lifting unit to extract the rolling guide, and a step of lowering the stage apparatus onto the positioning mount, from which the rolling guide is extracted, to cause the stage apparatus to abut a reference member and to position the stage apparatus, while hydrostatically supporting the stage apparatus by a hydrostatic bearing unit. A positioning apparatus for performing a positioning method is also set forth.