The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Sep. 17, 2004
Richard Lee Donze, Rochester, MN (US);
Karl Robert Erickson, Rochester, MN (US);
William Paul Hovis, Rochester, MN (US);
John Edward Sheets, Ii, Zumbrota, MN (US);
Jon Robert Tetzloff, Rochester, MN (US);
Richard Lee Donze, Rochester, MN (US);
Karl Robert Erickson, Rochester, MN (US);
William Paul Hovis, Rochester, MN (US);
John Edward Sheets, II, Zumbrota, MN (US);
Jon Robert Tetzloff, Rochester, MN (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An apparatus for measuring alignment of polysilicon shapes to a silicon area. Each polysilicon shape in a first plurality of polysilicon shapes has a bridging vertex positioned near the silicon area. Each polysilicon shape in a second plurality of polysilicon shapes has a bridging vertex positioned near the silicon area. The second plurality of silicon shapes is positioned on the opposite side of the silicon area from the first plurality of silicon shapes. An electrical measurement of how many of the polysilicon shapes in the first plurality of polysilicon shapes and in the second plurality of polysilicon shapes provides a measurement of alignment of the polysilicon shapes and the silicon area.