The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
May. 18, 2005
Applicants:
Cathie J. Burke, Rochester, NY (US);
Peter M. Gulvin, Webster, NY (US);
Inventors:
Cathie J. Burke, Rochester, NY (US);
Peter M. Gulvin, Webster, NY (US);
Assignee:
Xerox Corporation, Stamford, CT (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
Abstract
A thermal oxidation process is used to fill trenches with an oxide; however, the oxidation process consumes some of the silicon. The embodiments herein advantageously apply this tendency for the oxidation process to consume silicon so as to convert all the silicon substrate material between the multiple trenches into an oxide. Therefore, because all of the silicon between the multiple trenches is consumed by the oxidation process, the multiple smaller trenches are combined into a single larger trench filled with the oxide.