The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Aug. 10, 2004
Akio Yazaki, Fuchu, JP;
Mikio Hongo, Yokohama, JP;
Mutsuko Hatano, Kokubunji, JP;
Hiroshi Saito, Fujisawa, JP;
Makoto Ohkura, Fuchu, JP;
Akio Yazaki, Fuchu, JP;
Mikio Hongo, Yokohama, JP;
Mutsuko Hatano, Kokubunji, JP;
Hiroshi Saito, Fujisawa, JP;
Makoto Ohkura, Fuchu, JP;
Hitachi Displays, Ltd., Mobara, JP;
Abstract
An amorphous silicon film on an insulating substrate portion to be formed as an individual display panel in a large-sized insulating substrate is irradiated with a continuous-wave (CW) solid-state laser beam condensed linearly, while being scanned therewith at a fixed speed in the width direction of the condensed laser beam. A pixel portion and a peripheral circuit portion in the same insulating substrate portion are irradiated with the laser beam temporally modulated to have a power density high enough to provide predetermined crystallinity. The amorphous silicon film is transformed into a silicon film having crystallinity corresponding to performance required for thin film transistors to be built in each of the pixel portion and the peripheral circuit portion. In such a manner, a thin film transistor circuit having optimum crystallinity required in the pixel or peripheral circuit portion can be obtained while high throughput is kept. Thus, a product having good display features as a display panel can be provided inexpensively.