The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Dec. 27, 2004
Samhita Dasgupta, Niskayuna, NY (US);
Jeffrey Bernard Fortin, Niskayuna, NY (US);
Steven Francis Leboeuf, Schenectady, NY (US);
Vinayak Tilak, Schenectady, NY (US);
Chayan Mitra, Bangalore, IN;
Kanakasabapathi Subramanian, Clifton Park, NY (US);
Steven Alfred Tysoe, Ballston Spa, NY (US);
Samhita Dasgupta, Niskayuna, NY (US);
Jeffrey Bernard Fortin, Niskayuna, NY (US);
Steven Francis LeBoeuf, Schenectady, NY (US);
Vinayak Tilak, Schenectady, NY (US);
Chayan Mitra, Bangalore, IN;
Kanakasabapathi Subramanian, Clifton Park, NY (US);
Steven Alfred Tysoe, Ballston Spa, NY (US);
General Electric Company, Schenectady, NY (US);
Abstract
A sensor, in accordance with aspects of the present technique, is provided. The sensor comprises a membrane formed of gallium nitride. The membrane is disposed on a substrate, which is wet-etched to form a closed cavity. The membrane exhibits both a capacitive response and a piezo-response to an external stimulus. The sensor further includes a circuit for measuring at least one of the capacitive response or the piezo-response. In certain aspects, the sensor may be operable to measure external stimuli, such as, pressure, force and mechanical vibration.