The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
Jun. 13, 2003
Applicants:
Eckart Witzel, Herrenberg, DE;
Hansjoerg Haisch, Altdorf, DE;
Inventors:
Eckart Witzel, Herrenberg, DE;
Hansjoerg Haisch, Altdorf, DE;
Assignee:
Agilent Technologies, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/02 (2006.01); G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In order to reduce polarization dependent error, the polarization state of incident light is set to at least two different states of polarization, and a first optical property is determined separately for each of said at least two states of polarization. Then, an averaging procedure is carried out in order to obtain a mean value of the first optical property or of a property derived therefrom. Alternatively, the averaging procedure can be performed with respect to a DUT property of a device under test that is determined as a function of said first optical property.