The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
Feb. 03, 2005
Kyosuke Ozaki, Miyagi-ken, JP;
Makoto Sasaki, Miyagi-ken, JP;
Haruhiko Fujimoto, Gunma-ken, JP;
Satoshi Waga, Miyagi-ken, JP;
Kyosuke Ozaki, Miyagi-ken, JP;
Makoto Sasaki, Miyagi-ken, JP;
Haruhiko Fujimoto, Gunma-ken, JP;
Satoshi Waga, Miyagi-ken, JP;
Alps Electric Co., Ltd., Tokyo, JP;
Abstract
There is provided a surface acoustic wave device which can prevent a breakage of electrodes and electrical breaks, decrease an insertion loss of elements, and enhance a Q-factor of resonators. Interdigital electrode sections and each have a laminated structure of a base layer made of TiN (titanium nitride) or TiONand a main electrode layer deposited to come in contact with an upper surface of the base layer. The main electrode layer is deposited such that a {111} plane as a closest-packed plane of the main electrode layer has a constant gradient with respect to a surface of a substrate, and thus electromigration or stress migration can be suppressed in the interdigital electrode sections.