The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
Oct. 31, 2003
Applicants:
Hideo Wada, Tokyo, JP;
Naoki Oda, Tokyo, JP;
Inventors:
Hideo Wada, Tokyo, JP;
Naoki Oda, Tokyo, JP;
Assignees:
Director General, Technical Research Institute, Japan Defense Agency, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
In an area of a diaphragmas an infrared photosensitive portion of a thermal infrared detector, a fourth dielectric protective filmis etched and reduced in thickness to form a fifth dielectric protective filmso that the thickness of the diaphragmas a whole is reduced. With this structure, the thermal capacity of the diaphragmis decreased and the thermal time constant is reduced. This enables the thermal infrared detector to be operated at a high frame rate. A bolometer thin filmis formed throughout an entire surface of the diaphragm