The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
Jan. 20, 2003
Applicants:
Khim Hong NG, Singapore, SG;
Yeow Keong NG, Singapore, SG;
Kar Hwee Koh, Singapore, SG;
Inventors:
Assignee:
Systems on Silicon Manufacturing Company Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
A thin Titanium underlayeris included beneath a Titanium rich Titanium Nitride layerin a metal lineon a silicon substrate to reduce stress voiding.