The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
Apr. 02, 2001
Hiromoto Ohno, Kawasaki, JP;
Toshio Ohi, Kawasaki, JP;
Kazunari Kaga, Kawasaki, JP;
Ryuichi Tachi, Kawasaki, JP;
Itsuaki Matsuda, Yokohama, JP;
Hiromoto Ohno, Kawasaki, JP;
Toshio Ohi, Kawasaki, JP;
Kazunari Kaga, Kawasaki, JP;
Ryuichi Tachi, Kawasaki, JP;
Itsuaki Matsuda, Yokohama, JP;
Showa Denko K.K., Tokyo, JP;
Abstract
The present invention provided a method for measuring a halogen gas and/or a hydrofluorocarbon for the purpose of controlling the concentration of the halogen gas and/or the hydrofluorocarbon, in a plant producing a halogen compound or a perfluorocarbon, at a predetermined concentration level quickly, easily, and precisely for the control. The present invention provides also a measurement apparatus for the above measurement which has a compact structure, and in which the parts are exchangeable quickly and readily. The present invention provides further a process for producing a halogen compound or a perfluorocarbon employing the measurement method and the measurement apparatus. In particular, the present invention intends to provide a method for measuring safely and quickly a hydrofluorocarbon concentration in a mixed gas stream in a process of producing a perfluorocarbon by direct fluorination reaction of a hydrofluorocarbon and F.