The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2007
Filed:
Oct. 22, 2004
Scott Grimshaw, Marcellus, NY (US);
Scott Grimshaw, Marcellus, NY (US);
Tangidyne Corporation, Marcellus, NY (US);
Abstract
There is provided a chip for use in a combination microbalance and optical monitor sensor, the chip comprising a piezoelectric element and electrodes formed on a first surface thereof. At least a portion of the piezoelectric element is translucent. There is also provided a chip comprising a piezoelectric element and electrodes in contact with the piezoelectric element, at least a portion of at least the first electrode being translucent, and at least a portion of the piezoelectric element being translucent. Current can be applied through the electrodes to cause a region of the piezoelectric element to undergo vibration, and light can be passed through a portion of the region of the piezoelectric element which is undergoing the vibration. There is also provided a combination microbalance and optical monitor sensor, comprising a chip as described herein, and a method of simultaneously piezoelectric crystal vibration monitoring and optically monitoring a layer.