The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2007
Filed:
Apr. 26, 2005
Bradley L. Hunter, Lexington, MA (US);
Steven P. Cahill, Newton, MA (US);
Jonathan S. Ehrmann, Sudbury, MA (US);
Michael Plotkin, Newton, MA (US);
Bradley L. Hunter, Lexington, MA (US);
Steven P. Cahill, Newton, MA (US);
Jonathan S. Ehrmann, Sudbury, MA (US);
Michael Plotkin, Newton, MA (US);
GSI Group Corporation, Novi, MI (US);
Abstract
A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis.